전자/IT 응용기술
전자/IT 응용기술
OLED Metal mask Cleaner (LPM, FMM, CMM)
OLED Metal Shadow Mask Cleaner
- Fine Metal Mask <FMM>
- Common [Open] Matal Mask <CMM>
- Laser Patterning Mask <LPM>
- μ - OLED Patterning Mask Clean...
[Features]
- Half & Full Auto Mode [OHT / OHS/ AGV Interface]
- 4G ~6G Half FMM & LPM Mask [Vertlcal]
- 8G FMM & CMM Mask [Horlzontal]
[Specification]
- Object Layer
- 1. Organic [R,G,B EML] 2. In-organlc [Common Layer]
- 3. Cathode Metal [Ag, Ag-Mg, LIF, Mg] 4. CVD [Oxlde & Nltrlde]
- Mask Broken Inspectlon [In / Out]
-Auto Mask Count & Inspectlon
- CE Certlflcation & Seml S2-93
- IECEx Assembly Exploslon Proof
Cassette & FOUP, FOSB Cleaner
Cassette & FOUP, FOSB Cleaner
- Semi. 200mm Cassette Clean
- Semi. 300mm FOUP & FOSB Clean
- Glass Substrate CST Cleaner
-OLED Mask CST & Glass Cassette
[Features]
- Half & Full Auto Mode (OHT / OHS/ AGV Interface)
- 150mm ~ Gen.10 Glass Cassette Clean
- User Graphlc Interface
[Specification]
- DIW Clean
- -High Pressure (D-Sonic Nozzie)
- -Nozzle Spin & Rotation (up/down)
- Dry Process
- -ECO Dry System
- -IR Lamp & UV
- -Spin Dry System
- CE Cerlflcatlon & Seml S2-93