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OLED Metal mask Cleaner (LPM, FMM, CMM)

OLED Metal Shadow Mask Cleaner
  • Fine Metal Mask <FMM>
  • Common [Open] Matal Mask <CMM>
  • Laser Patterning Mask <LPM>
  • μ - OLED Patterning Mask Clean...
[Features]
  • Half & Full Auto Mode [OHT / OHS/ AGV Interface]
  • 4G ~6G Half FMM & LPM Mask [Vertlcal]
  • 8G FMM & CMM Mask [Horlzontal]
[Specification]
  • Object Layer
    1. 1. Organic [R,G,B EML] 2. In-organlc [Common Layer]
    2. 3. Cathode Metal [Ag, Ag-Mg, LIF, Mg] 4. CVD [Oxlde & Nltrlde]
  • Mask Broken Inspectlon [In / Out]

    -Auto Mask Count & Inspectlon

  • CE Certlflcation & Seml S2-93
  • IECEx Assembly Exploslon Proof

Cassette & FOUP, FOSB Cleaner

Cassette & FOUP, FOSB Cleaner
  • Semi. 200mm Cassette Clean
  • Semi. 300mm FOUP & FOSB Clean
  • Glass Substrate CST Cleaner

    -OLED Mask CST & Glass Cassette

[Features]
  • Half & Full Auto Mode (OHT / OHS/ AGV Interface)
  • 150mm ~ Gen.10 Glass Cassette Clean
  • User Graphlc Interface
[Specification]
  • DIW Clean
    • -High Pressure (D-Sonic Nozzie)
    • -Nozzle Spin & Rotation (up/down)
  • Dry Process
    • -ECO Dry System
    • -IR Lamp & UV
    • -Spin Dry System
  • CE Cerlflcatlon & Seml S2-93