최첨단 세정 장비기술
최첨단 세정 장비기술
Wet Station (Batch Processor)
Semi Wet Station (Batch Processor)
- D-ram & logic
- Silicon Wafer
- Solar Poly Silicon...
- Photo Mask Cleaner
[Features]
- Half & Full Auto Mode (OHT / OHS/ AGV Interface)
- 150~mm ~ 300mm Wafer Wet Etch & Clean
- User Grapic Interface
[Specification]
- Etch Clean Solution
1. Chemlcal [Clean & Etch] → 2. DIW [Rlnse / Flnal Rlnse] → 3. Dry : Marangonl & Eco Dryer
- Devlce Process
-Oxlde / Nltrlde / PR / Dlff ＇/ Photo...
- Wafer Broken Inspectlon [in /Out]
-Auto Wafer Count & Inspectlon
- CE Certlflcatlon & Seml S2-93
Wet Single Spin Processor
Semi Spin Wet Etcher (Single Processor)
- D-ram & Logic
- μ - OLED Initial & Process Clean (OLEDoS)
- Silicon Wafer
- Chemical E/R & Clean Trace...
- Photo Mask Cleaner
[Features]
- Half & Full Auto Mode (OHT / OHS/ AGV Interface)
- 150~mm ~ 300mm Wafer Etch & Clean
- User Grapic Interface
[Specification]
- Etch Clean Solutlon
1. Chemlcal [Clean & Etch] → 2. DIW [Rlnse] / Final Rlnse] → 3.Dry : Spln [max. 5000rpm]
- Devlce Process
-Oxlde / Nltrlde / PR / Diff ＇/ Photo...
- Wafer Broken Inspection [in /Out]
-Auto Wafer Count & Inspection
- CE Certlflcatlon & Seml S2-93
Wafering & Solar (Pre & Final) Equipment
Wafering & Solar cell
- Poly & Slug Etcher
- Wafer Pre & Final Cleaner [PRTCA, CETC]
- Slim Rod Etch & Cleaner
- Crystalline Surface Textureing
- Pre & Post Cleaner (Initial & Final)
- ECO Dryer System
[Features]
- Half & Full Auto Mode (OHT / OHS/ AGV Interface)
- 150~mm ~ 300mm Wafer Etch & Clean
- User Grapic Interface
- Metal Ion & P/C Removal & Clean
[Specification]
- Etch Clean Solutlon
- 1. Chemlcal / DIW / ECO Dryer
- 2. Batch Dlp & Horlzontal [매엽식]
- Wafer Broken Inspectㅣon [in /Out]
-Auto Wafer Count & Inspectlon
- CE Certlflcatlon & Seml S2-93