최첨단 세정 장비기술

HOME

최첨단 세정 장비기술

Wet Station (Batch Processor)

Semi Wet Station (Batch Processor)
  • D-ram & logic
  • Silicon Wafer
  • Solar Poly Silicon...
  • Photo Mask Cleaner
[Features]
  • Half & Full Auto Mode (OHT / OHS/ AGV Interface)
  • 150~mm ~ 300mm Wafer Wet Etch & Clean
  • User Grapic Interface
[Specification]
  • Etch Clean Solution

    1. Chemlcal [Clean & Etch] → 2. DIW [Rlnse / Flnal Rlnse] → 3. Dry : Marangonl & Eco Dryer

  • Devlce Process

    -Oxlde / Nltrlde / PR / Dlff '/ Photo...

  • Wafer Broken Inspectlon [in /Out]

    -Auto Wafer Count & Inspectlon

  • CE Certlflcatlon & Seml S2-93

Wet Single Spin Processor

Semi Spin Wet Etcher (Single Processor)
  • D-ram & Logic
  • μ - OLED Initial & Process Clean (OLEDoS)
  • Silicon Wafer
  • Chemical E/R & Clean Trace...
  • Photo Mask Cleaner
[Features]
  • Half & Full Auto Mode (OHT / OHS/ AGV Interface)
  • 150~mm ~ 300mm Wafer Etch & Clean
  • User Grapic Interface
[Specification]
  • Etch Clean Solutlon

    1. Chemlcal [Clean & Etch] → 2. DIW [Rlnse] / Final Rlnse] → 3.Dry : Spln [max. 5000rpm]

  • Devlce Process

    -Oxlde / Nltrlde / PR / Diff '/ Photo...

  • Wafer Broken Inspection [in /Out]

    -Auto Wafer Count & Inspection

  • CE Certlflcatlon & Seml S2-93

Wafering & Solar (Pre & Final) Equipment

Wafering & Solar cell
  • Poly & Slug Etcher
  • Wafer Pre & Final Cleaner [PRTCA, CETC]
  • Slim Rod Etch & Cleaner
  • Crystalline Surface Textureing
  • Pre & Post Cleaner (Initial & Final)
  • ECO Dryer System
[Features]
  • Half & Full Auto Mode (OHT / OHS/ AGV Interface)
  • 150~mm ~ 300mm Wafer Etch & Clean
  • User Grapic Interface
  • Metal Ion & P/C Removal & Clean
[Specification]
  • Etch Clean Solutlon
    1. 1. Chemlcal / DIW / ECO Dryer
    2. 2. Batch Dlp & Horlzontal [매엽식]
  • Wafer Broken Inspectㅣon [in /Out]

    -Auto Wafer Count & Inspectlon

  • CE Certlflcatlon & Seml S2-93