1. Chemlcal [Clean & Etch] → 2. DIW [Rlnse / Flnal Rlnse] → 3. Dry : Marangonl & Eco Dryer
-Oxlde / Nltrlde / PR / Dlff '/ Photo...
-Auto Wafer Count & Inspectlon
1. Chemlcal [Clean & Etch] → 2. DIW [Rlnse] / Final Rlnse] → 3.Dry : Spln [max. 5000rpm]
-Oxlde / Nltrlde / PR / Diff '/ Photo...
-Auto Wafer Count & Inspection
-Auto Wafer Count & Inspectlon